ANALYSIS OF ZIRCONIUM NITRIDE FILM BY INDUCTIVELY COUPLED PLASMA EMISSION SPECTROMETRY

被引：0

作者：

Tsukahara, Ryoichi ^{[1
]}

Hirota, Yoshihiro ^{[1
]}

Kubota, Yoshikane ^{[1
]}

Ichikawa, Goro ^{[1
]}

机构：

[1] Sumitomo Met Min Co LTD, Cent Res Lab, Ichikawa, Chiba 272, Japan

来源：

ANALYTICAL SCIENCES | 1991年 / 7卷

关键词：

zirconium nitride; ICP-AES; titration;

D O I：

10.2116/analsci.7.Supple_1251

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

After digestion of zirconium nitride film in hydrofluoric acid without loss of nitrogen, zirconium and nitrogen were determined by inductively coupled plasma-atomic emission spectrometry with internal standardization and titration method using an autotitrator respectively. The molar ratio of zirconium to nitrogen was 1:0.99 and the RSD for 4 samples was 0.49%.

引用

页码：1251 / 1254

页数：4

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