ANALYSIS OF ZIRCONIUM NITRIDE FILM BY INDUCTIVELY COUPLED PLASMA EMISSION SPECTROMETRY

被引：0
作者：
Tsukahara, Ryoichi [1 ]
Hirota, Yoshihiro [1 ]
Kubota, Yoshikane [1 ]
Ichikawa, Goro [1 ]
机构：
[1] Sumitomo Met Min Co LTD, Cent Res Lab, Ichikawa, Chiba 272, Japan
来源：
ANALYTICAL SCIENCES | 1991年 / 7卷
关键词：
zirconium nitride; ICP-AES; titration;
D O I：
10.2116/analsci.7.Supple_1251
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
After digestion of zirconium nitride film in hydrofluoric acid without loss of nitrogen, zirconium and nitrogen were determined by inductively coupled plasma-atomic emission spectrometry with internal standardization and titration method using an autotitrator respectively. The molar ratio of zirconium to nitrogen was 1:0.99 and the RSD for 4 samples was 0.49%.
引用
收藏
页码：1251 / 1254
页数：4
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