PROBLEMS OF SCANNING AUGER-ELECTRON MICROSCOPY

被引：2

作者：

FRANK, L

机构：

[1] Institute of Scientific Instruments, Czechoslovak Academy of Sciences, 612 64 Brno

来源：

VACUUM | 1991年 / 42卷 / 1-2期

关键词：

D O I：

10.1016/0042-207X(91)90098-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Some problems of scanning Auger electron microscopy (SAEM) concerning instrumentation and experimental techniques are described and briefly discussed in the light of the fundamental limitations of the method set by the nature of the phenomena themselves. © 1990.

引用

页码：147 / 150

页数：4

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