SN-119 CONVERSION ELECTRON MOSSBAUER SPECTROMETRIC (CEMS) STUDY ON TRANSPARENT CONDUCTIVE ITO AND TIN OXIDE-FILMS

被引：5
|
作者：
NOMURA, K [1 ]
UJIHIRA, Y [1 ]
SHARMA, SS [1 ]
MATSUMOTO, K [1 ]
机构：
[1] ASAHI GLASS RES LAB,KANAGAWA KU,YOKOHAMA,KANAGAWA 221,JAPAN
来源：
HYPERFINE INTERACTIONS | 1990年 / 57卷 / 1-4期
关键词：
D O I：
10.1007/BF02405758
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
摘要：
Indium-tin oxides (ITO) films were prepared on glass by Ar ion sputtering, ion plating and electron beam melting in vacuum, and tin oxide films were prepared by chemical vapour deposition (CVD) of SnCl4 in methanol containing HF. The chemical state of samples prepared was analyzed by CEMS. ITO films, produced from ITO source materials with higher solubility of tin oxide, showed lower electric resistivity. Amorphous ITO films had larger quadrupole splitting than crystalline ones. The tin oxide films were exposed in hydrogen plasma and hydrogen gas and the change of these films was also assessed by CEMS. © 1990 J.C. Baltzer A.G. Scientific Publishing Company.
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页码：2015 / 2021
页数：7
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