A SENSITIVE OPTICALLY-EXCITED RESONATOR PRESSURE SENSOR

被引:21
作者
THORNTON, KEB [1 ]
UTTAMCHANDANI, D [1 ]
CULSHAW, B [1 ]
机构
[1] UNIV STRATHCLYDE,ROYAL COLL,DEPT ELECTR & ELECT ENGN,GLASGOW G1 1XW,SCOTLAND
关键词
D O I
10.1016/0924-4247(90)80042-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel pressure-sensitive micromechanical resonator sensor has been fabricated by anisotropic etching of silicon. The resonator is driven into transverse vibration when a laser beam, intensity modulated at the natural frequency of the resonator, is incident at its centre. A separate heterodyne interferometer is used to probe the vibration. Pressure applied to the sensor causes a change in its natural frequency and we report that the pressure sensitivity of the resonance frequency changes from 3.5%/bar to 31%/bar for different sensor parameters. © 1990.
引用
收藏
页码:15 / 19
页数:5
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