INFLUENCE OF OXIDE LAYERS ON DETERMINATION OF OPTICAL PROPERTIES OF SILICON

被引：126

作者：

PHILIPP, HR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 06期

关键词：

D O I：

10.1063/1.1661603

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2835 / &

共 23 条

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J].

ARCHER, RJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) :970-&

[2] REFLECTANCE-INCREASING COATINGS FOR THE VACUUM ULTRAVIOLET AND THEIR APPLICATIONS [J].

BERNING, PH ;

HAAS, G ;

MADDEN, RP .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (06) :586-597

[3] OPTICAL PROPERTIES + BAND STRUCTURE OF GROUP 4-6 + GROUP 5 MATERIALS [J].

CARDONA, M ;

GREENAWAY, DL .

PHYSICAL REVIEW, 1964, 133 (6A) :1685-+

[4]

CULLEN GW, 1970, RCA REV, V31, P355

[5] INTRINSIC OPTICAL ABSORPTION IN SINGLE-CRYSTAL GERMANIUM AND SILICON AT 77-DEGREES-K AND 300-DEGREES-K [J].

DASH, WC ;

NEWMAN, R .

PHYSICAL REVIEW, 1955, 99 (04) :1151-1155

[6] ENERGIEANALYSE IM ELEKTRONENSTREUDIAGRAMM EINER DUNNEN SILIZIUM-FOLIE [J].

DIMIGEN, H .

ZEITSCHRIFT FUR PHYSIK, 1961, 165 (01) :53-&

[7]

GAHWILLER C, 1970, 10 P INT C PHYS SEM, P213

[8]

Heavens O. S., 1955, OPTICAL PROPERTIES T

[9] ON VACUUM-ULTRAVIOLET REFELECTANCE OF EVAPORATED ALUMINUM BEFORE AND DURING OXIDATION [J].

MADDEN, RP ;

HASS, G ;

CANFIELD, LR .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (05) :620-&

[10] OPTICAL PROPERTIES OF GERMANIUM IN FAR ULTRAVIOLET [J].

MARTON, L ;

TOOTS, J .

PHYSICAL REVIEW, 1967, 160 (03) :602-&

← 1 2 3 →