CYLINDRICAL MAGNETRON SPUTTERING SYSTEM FOR COATING SOLAR SELECTIVE SURFACES ONTO BATCHES OF TUBES

被引：48

作者：

HARDING, GL

WINDOW, B

MCKENZIE, DR

COLLINS, AR

HORWITZ, CM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570349

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Construction and operation of a cylindrical magnetron sputtering system for coating glass tubes with solar selective surfaces is discussed. A metal carbide on copper selective surface produced in the coater is examined in terms of uniformity of coating thickness, electrical and optical properties. Short pumpdown times and high deposition rates make this a medium volume productive system.

引用

页码：2105 / 2108

页数：4