STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM

被引：62
作者：
HADA, T
WASA, K
HAYAKAWA, S
机构：
来源：
THIN SOLID FILMS | 1971年 / 7卷 / 02期
关键词：
D O I：
10.1016/0040-6090(71)90032-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：135 / &
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