ELECTROMIGRATION FAILURE AT ALUMINUM-SILICON CONTACTS

被引：13
作者：
PROKOP, GS
JOSEPH, RR
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 06期
关键词：
D O I：
10.1063/1.1661564
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：2595 / &
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