共 12 条
[1]
DESIGN OF FAST DEFLECTION COILS FOR AN ELECTRON-BEAM MICROFABRICATION SYSTEM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (06)
:1152-1155
[2]
BARDIZH VV, 1974, MAGNETIC ELEMENTS DI, P8
[3]
BONSHTEDT BE, 1967, BEAM FOCUSING DEFLEC, P150
[4]
BRILLIANTOV DF, 1975, DESIGN EFFICIENT MAG, P116
[5]
GLAZER V, 1957, F ELECTRON OPTICS, P528
[6]
KATAGIRI S, 1973, Patent No. 3736423
[7]
DESIGN AND OPTIMIZATION OF MAGNETIC LENSES AND DEFLECTION SYSTEMS FOR ELECTRON-BEAMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (06)
:1146-1150
[8]
ABERRATION CORRECTION FOR INCREASED LINES PER FIELD IN SCANNING ELECTRON-BEAM TECHNOLOGY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1973, 10 (06)
:983-986
[9]
NEW IMAGING AND DEFLECTION CONCEPT FOR PROBE-FORMING MICROFABRICATION SYSTEMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (06)
:1170-1173
[10]
PFEIFFER HC, 1974, 8TH INT C EL MICR CA, V1, P56