Effect of Substrate Bias and Temperature on Friction and Wear Properties for ta-C Coating Prepared under Different Substrate Bias Voltages with Filtered Cathodic Vacuum Arc Deposition

In this paper, the tribological behaviors of 1 mu m of tetrahedral amorphous carbon (ta-C) coatings deposited with a different substrate bias of -0 V, -100 V and -300 V are examined under elevated temperature up to 600 degrees C. It is found that wear behavior could be divided into two distinct regions according to testing temperature. The variation trend of the specific wear rate of ta-C coatings in region I at 23, 100 and 200 degrees C are affected by abrasive particles which coincide with sp(3) content of ta-C coatings. In region II at 300, 400 and 500 degrees C, the transfer layer play a major role in reduction of wear rate as a function of substrate bias.