PULSED LASER-INDUCED DAMAGE THRESHOLD STUDIES OF THIN ALUMINUM FILMS ON QUARTZ - SIMULTANEOUS MONITORING OF OPTICAL AND ACOUSTIC-SIGNALS

被引：14
作者：
LAI, YM
CHEUNG, NH
机构：
[1] Department of Physics, Hong Kong Baptist College, Hong Kong, Waterloo Road
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 06期
关键词：
D O I：
10.1063/1.1144033
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Simultaneous measurements by two techniques for in situ laser-induced damage threshold (LIDT) detection, based on optical diffraction and acoustic measurements, were demonstrated. Pulsed Nd:YAG laser (532 nm) ablation of 25-nm-thick aluminum films on quartz was studied as a test case. The two probes gave consistent LIDT values, and were sensitive and simple to operate. For above-threshold ablation, the diffraction and acoustic signals were found to be strongly correlated, rendering them useful not just for threshold detection, but for studying ablation dynamics as well.
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页码：1606 / 1610
页数：5
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