ELECTRON-RESIST FABRICATION OF BENDS AND COUPLERS FOR INTEGRATED OPTICAL CIRCUITS

被引：29
作者：
GOELL, JE [1 ]
机构：
[1] BELL TEL LABS, CRAWFORD HILL LAB, HOLMDEL, NJ 07733 USA
来源：
APPLIED OPTICS | 1973年 / 12卷 / 04期
关键词：
D O I：
10.1364/AO.12.000729
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：729 / 736
页数：8
相关论文
共 13 条
[1]  
AMBOSS K, 1971, S ELECTRON ION LASER
[2]   A CIRCULAR-HARMONIC COMPUTER ANALYSIS OF RECTANGULAR DIELECTRIC WAVEGUIDES [J].
GOELL, JE .
BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (07) :2133-+
[3]   SPUTTERED GLASS WAVEGUIDE FOR INTEGRATED OPTICAL CIRCUITS [J].
GOELL, JE ;
STANDLEY, RD .
BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10) :3445-+
[4]  
GOELL JE, 1972, FEB OSA TOP M INT OP, pMB81
[5]   HIGH-RESOLUTION POSITIVE RESISTS FOR ELECTRON-BEAM EXPOSURE [J].
HALLER, I ;
HATZAKIS, M ;
SRINIVASAN, R .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1968, 12 (03) :251-+
[6]  
LI T, 1972, FEB OSA TOP M INT OP
[7]   DIELECTRIC RECTANGULAR WAVEGUIDE AND DIRECTIONAL COUPLER FOR INTEGRATED OPTICS [J].
MARCATILI, EA .
BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (07) :2071-+
[8]   BENDS IN OPTICAL DIELECTRIC GUIDES [J].
MARCATILI, EA .
BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (07) :2103-+
[9]   MODE CONVERSION CAUSED BY SURFACE IMPERFECTIONS OF A DIELECTRIC SLAB WAVEGUIDE [J].
MARCUSE, D .
BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10) :3187-+
[10]   INTEGRATED OPTICS - AN INTRODUCTION [J].
MILLER, SE .
BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (07) :2059-+
12