MONTE CARLO SIMULATION OF NUCLEATION OF THIN FILMS

被引：8

作者：

FEBER, RC

ALLEN, LDF

GRIMMERT, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 02期

关键词：

D O I：

10.1116/1.1314473

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：397 / &

共 12 条

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[5]

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