MICROWAVE PHOTOCONDUCTIVITY SCANNING MICROSCOPE STUDIES OF SILICON SURFACES

被引：9

作者：

SCHLICHTHORL, G

BECK, G

LILIE, J

TRIBUTSCH, H

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 09期

关键词：

D O I：

10.1063/1.1140640

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：2992 / 3003

页数：12

共 14 条

[1] CONTACTLESS SCANNER FOR PHOTOACTIVE MATERIALS USING LASER-INDUCED MICROWAVE-ABSORPTION [J].

BECK, G ;

KUNST, M .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (02) :197-201

[2]

BOGENSCHUTZ AF, 1967, ATZPRAXIS HALBLEITER, P190

[3]

CHEMINSKY G, 1984, P MRS EUROPE STRASBO

[4] AUTOMATIC LASER SCANNER FOR SOLAR-CELLS [J].

KHANNA, V ;

SASTRY, OS ;

MUKERJEE, AK ;

CHOPRA, KL .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (10) :1580-1584

[5]

KITTEL C, 1983, EINFUHRUNG FESTKORPE, P469

[6] THE STUDY OF CHARGE CARRIER KINETICS IN SEMICONDUCTORS BY MICROWAVE CONDUCTIVITY MEASUREMENTS [J].

KUNST, M ;

BECK, G .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (10) :3558-3566

[7]

LEAMY HJ, 1982, J APPL PHYS, V53, pR57

[8] MICROWAVE PHOTOELECTROCHEMISTRY OF N-WSE2 [J].

MESSER, B ;

TRIBUTSCH, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (10) :2212-2213

[9] SILICON-HYDROGEN INTERACTION SEEN BY MICROWAVE-PHOTOELECTROCHEMICAL TECHNIQUES [J].

MESSER, B ;

TRIBUTSCH, H .

CHEMICAL PHYSICS LETTERS, 1987, 142 (06) :546-550

[10] MINORITY-CARRIER LIFETIME MAPPING IN SILICON USING A MICROPROCESSOR-CONTROLLED FLYING-SPOT SCANNER [J].

NORDLANDER, E ;

DRUGGE, B ;

TAPIA, M .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1985, 18 (01) :65-68

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