RECENT DEVELOPMENTS IN REACTIVELY SPUTTERED OPTICAL THIN-FILMS

被引：0

作者：

PAWLEWICZ, WT

MARTIN, PM

HAYS, DD

MANN, IB

机构：

来源：

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1982年 / 325卷

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D O I：

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中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：105 / 116

页数：12

共 8 条

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[2] INFLUENCE OF SPUTTERING CONDITIONS ON H CONTENT AND SI-H BONDING IN A-SI-H ALLOYS [J].

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[3]

MARTIN PM, 1979, SOLAR ENERGY MATERIA, V2, P143

[4] HIGH BAND-GAP OXIDE OPTICAL COATINGS FOR 0.25 AND 1.06 MU-M FUSION LASERS [J].

PAWLEWICZ, WT ;

HAYS, DD ;

MARTIN, PM .

THIN SOLID FILMS, 1980, 73 (01) :169-175

[5] BONDING AND COMPOSITION DIAGRAMS FOR SPUTTERED A-SI-H [J].

PAWLEWICZ, WT ;

MARTIN, PM .

SOLID STATE COMMUNICATIONS, 1981, 39 (02) :337-339

[6] REACTIVELY SPUTTERED OXIDE OPTICAL COATINGS FOR INERTIAL CONFINEMENT FUSION LASER COMPONENTS [J].

PAWLEWICZ, WT ;

BUSCH, R .

THIN SOLID FILMS, 1979, 63 (02) :251-256

[7] LASER-DAMAGE-RESISTANT TRANSPARENT CONDUCTIVE INDIUM TIN OXIDE COATINGS [J].

PAWLEWICZ, WT ;

MANN, IB ;

LOWDERMILK, WH ;

MILAM, D .

APPLIED PHYSICS LETTERS, 1979, 34 (03) :196-198

[8]

PAWLEWICZ WT, 1980, NBS SPEC PUBL, V508, P359

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