RAPID AND ACCURATE MEASUREMENT OF THE THICKNESS OF THIN-FILMS BY AN X-RAY-FLUORESCENCE TECHNIQUE USING A NEW BACKGROUND SUBTRACTION METHOD

被引：3
作者：
CIRONE, R
GIGANTE, GE
GUALTIERI, G
PICOZZI, P
SANTUCCI, S
机构：
来源：
THIN SOLID FILMS | 1982年 / 88卷 / 01期
关键词：
D O I：
10.1016/0040-6090(82)90353-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：81 / 85
页数：5
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