Complex approach to investigate mechanical and tribological characteristics of microcontacting objects for MEMS

被引：0
|
作者：
Abetkovskaia, S. [1 ]
Chizhik, S. [1 ]
Nazaruk, P. [2 ]
Stelmachowski, J. M. [2 ]
Rymuza, Z. [2 ]
机构：
[1] Natl Acad Sci Belarus, AV Luikov Heat & Mass Transfer Inst, Minsk, BELARUS
[2] Warsaw Univ Technol, Inst Micromech & Photon, Warsaw, Poland
来源：
TRIBOLOGY-MATERIALS SURFACES & INTERFACES | 2013年 / 7卷 / 02期
关键词：
Atomic force microscopy; Young's modulus; Adhesion; Friction; Thermoheating cell; Polymethylmethacrylate; Thin layers;
D O I：
10.1179/1751584X13Y.0000000035
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A complex approach based on atomic force microscopy (AFM) is developed to establish influence of nanoscale layer thickness on its elastic, adhesive and frictional properties of polymeric coatings for microelectromechanical systems. Thermoheating element was applied to perform AFM measurements with thermal effects in the temperature range from 20 to 120 degrees C. Friction coefficients at high velocities of sliding and dependences of friction coefficient on the temperature of heated films at low velocities of sliding are defined. This study concludes that the Young's modulus of ultrathin polymeric films on silicon substrate is reduced when thickness or temperature is increased.
引用
收藏
页码：83 / 86
页数：4
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