THEORETICAL-MODEL OF THIN-FILM DEPOSITION PROFILE WITH SHADOW EFFECT

被引：30
作者：
YAO, SK
机构：
[1] Electronics Research Center, Rockwell International Corporation, Anaheim
来源：
JOURNAL OF APPLIED PHYSICS | 1979年 / 50卷 / 05期
关键词：
D O I：
10.1063/1.326330
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A theoretical model and a computational algorithm are presented for the shadow deposition of thin films through a generalized mask of finite dimensions in a vacuum environment. The computer model enables a theoretical study of the deposited-film-thickness profile from extended sources with shadow effect. Numerical evaluation of the masked deposition profile has been carried out to illustrate the film-profile dependences on several basic mask parameters. Using computer-aided design procedures, a deposition mask has been successfully constructed for the fabrication of precisely shaped thin-film Luneburg lenses for guided-optical-wave applications.
引用
收藏
页码：3390 / 3395
页数：6
相关论文
共 7 条
[1]   ZNO FILMS FOR SURFACE ACOUSTOOPTIC DEVICES ON NONPIEZOELECTRIC SUBSTRATES [J].
CHUBACHI, N .
PROCEEDINGS OF THE IEEE, 1976, 64 (05) :772-774
[2]  
Maissel L.I., 1970, HDB THIN FILM TECHNO, P1
[3]   FABRICATION TECHNIQUES FOR SURFACE-ACOUSTIC-WAVE AND THIN-FILM OPTICAL DEVICES [J].
SMITH, HI .
PROCEEDINGS OF THE IEEE, 1974, 62 (10) :1361-1387
[4]   THIN-FILM BEAM SPLITTER FOR INTEGRATED-OPTICS [J].
VINCENT, D ;
LIT, JWY .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (04) :533-538
[5]   SHADOW SPUTTERED DIFFRACTION-LIMITED WAVEGUIDE LUNEBURG LENSES [J].
YAO, SK ;
ANDERSON, DB .
APPLIED PHYSICS LETTERS, 1978, 33 (04) :307-309
[6]   GUIDED-WAVE ACOUSTOOPTIC INTERACTION ON NON-PIEZOELECTRIC SUBSTRATES [J].
YAO, SK ;
AUGUST, RR ;
ANDERSON, DB .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) :5728-5730
[7]   LUNEBURG LENS FOR OPTICAL-WAVEGUIDE USE [J].
ZERNIKE, F .
OPTICS COMMUNICATIONS, 1974, 12 (04) :379-381
1