A SELF-LATCHING ELECTRO-MECHANICAL SHUTTER FOR USE IN VACUUM EVAPORATORS

被引:2
|
作者
PENDER, LF
MUGGLETON, AHF
机构
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1981年 / 14卷 / 10期
关键词
D O I
10.1088/0022-3735/14/10/008
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:1139 / 1140
页数:2
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