EFFECTS OF ANNEALING ON THE STRUCTURE AND ELECTRICAL-CONDUCTIVITY OF CVD ALUMINA FILMS

被引：5

作者：

WONG, AS

MICHAL, GM

LOCCI, IE

CHEUNG, PW

机构：

[1] CASE WESTERN RESERVE UNIV,CTR ELECTR DESIGN,CLEVELAND,OH 44106

[2] CASE WESTERN RESERVE UNIV,DEPT MAT SCI & ENGN,CLEVELAND,OH 44106

[3] UNIV WASHINGTON,DEPT ELECT ENGN,SEATTLE,WA 98195

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 05期

关键词：

D O I：

10.1557/JMR.1988.1002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1002 / 1009

页数：8

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