X-RAY-LITHOGRAPHY USING A PULSED PLASMA SOURCE

被引：62

作者：

PEARLMAN, JS

RIORDAN, JC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571241

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1190 / 1193

页数：4

共 15 条

[1] MEASUREMENTS OF THE DYNAMICS OF IMPLODING WIRE ARRAYS [J].

BENJAMIN, RF ;

PEARLMAN, JS ;

CHU, EY ;

RIORDAN, JC .

APPLIED PHYSICS LETTERS, 1981, 39 (10) :848-850

[2] AN X-RAY-LITHOGRAPHY SYSTEM [J].

BUCKLEY, WD ;

HUGHES, GP .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (05) :1106-1111

[3] X-RAY LINE SPECTRA FROM EXPLODED-WIRE ARRAYS [J].

BURKHALTER, P ;

DAVIS, J ;

RAUCH, J ;

CLARK, W ;

DAHLBACKA, G ;

SCHNEIDER, R .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (02) :705-711

[4] X-RAY-SPECTRA FROM A GAS-PUFF Z-PINCH DEVICE [J].

BURKHALTER, PG ;

SHILOH, J ;

FISHER, A ;

COWAN, RD .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (07) :4532-4540

[5]

CLARK W, 1981, MLR1960 MAXW REP

[6]

GROBMAN W, HDB SYNCHRONTRON RAD, V1

[7]

HUGHES G, COMMUNICATION

[8] X-RAY-LITHOGRAPHY BREAKS THE SUBMICROMETER BARRIER [J].

LEPSELTER, MP .

IEEE SPECTRUM, 1981, 18 (05) :26-29

[9] FLASH X-RAY MICROSCOPY [J].

MCCORKLE, R ;

ANGILELLO, J ;

COLEMAN, G ;

FEDER, R ;

LAPLACA, SJ .

SCIENCE, 1979, 205 (4404) :401-402

[10]

PECKERAR MC, 1978, J ELECTROCHEM SOC, V78, P432

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