DIELECTRIC-PROPERTIES OF RF-MAGNETRON-SPUTTERED (BA, PB)(ZR, TI)O3 THIN-FILMS

被引：9

作者：

TORII, K

KAGA, T

TAKEDA, E

机构：

[1] Central Research Laboratory Hitachi Ltd., Kokubunji, Tokyo

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 9B期

关键词：

FERROELECTRIC; SPUTTERING; THIN FILM; DIELECTRIC CONSTANT; CRYSTALLIZATION TEMPERATURE; LEAKAGE CURRENT;

D O I：

10.1143/JJAP.31.2989

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Barium lead zirconate titanate (or (Ba, Pb)(Zr, Ti)03, BPZT) thin films have been successfully fabricated from a stoichiometric target by rf-magnetron sputtering. The dielectric properties of these films were investigated. They were found to have good properties for LSI capacitor applications, e.g., high dielectric constant (epsilon almost-equal-to 400), low temperature coefficient, low leakage current, and low crystallization temperature (550-degrees-C).

引用

页码：2989 / 2991

页数：3

共 9 条

[1]

FEDULOV SA, 1962, SOV PHYS-CRYSTALLOGR, V6, P547

[2] STUDIES ON (BA-PB)(TI-ZR)O3 SYSTEM [J].

IKEDA, T .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1959, 14 (02) :168-174

[3]

KASHIHARA K, 1991, 1991 INT C SOL STAT, P192

[4]

MIYASAKA Y, 1991, 7TH P INT S APPL FER

[5] A FERROELECTRIC DRAM CELL FOR HIGH-DENSITY NVRAMS [J].

MOAZZAMI, R ;

HU, CM ;

SHEPHERD, WH .

IEEE ELECTRON DEVICE LETTERS, 1990, 11 (10) :454-456

[6]

OKUDAIRA T, 1991, 1991 INT C SOL STAT, P204

[7] SINGLE-TARGET SPUTTRING PROCESS FOR LEAD ZIRCONATE TITANATE THIN-FILMS WITH PRECISE COMPOSITION CONTROL [J].

TORII, K ;

KAGA, T ;

KUSHIDA, K ;

TAKEUCHI, H ;

TAKEDA, E .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (12B) :3562-3566

[8] REACTIVE COEVAPORATION SYNTHESIS AND CHARACTERIZATION OF SRTIO3 THIN-FILMS [J].

YAMAGUCHI, H ;

MATSUBARA, S ;

MIYASAKA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2197-2199

[9] SRTIO3 THIN-FILM PREPARATION BY ION-BEAM SPUTTERING AND ITS DIELECTRIC-PROPERTIES [J].

YAMAMICHI, S ;

SAKUMA, T ;

TAKEMURA, K ;

MIYASAKA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2193-2196

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