OPTICAL-PROPERTIES AND MICROSTRUCTURE OF REACTIVELY SPUTTERED INDIUM NITRIDE THIN-FILMS

被引：36

作者：

SULLIVAN, BT

PARSONS, RR

WESTRA, KL

BRETT, MJ

机构：

[1] UNIV ALBERTA,DEPT ELECT ENGN,EDMONTON T6G 2G7,ALBERTA,CANADA

[2] UNIV BRITISH COLUMBIA,DEPT PHYS,VANCOUVER V6T 2A6,BC,CANADA

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 08期

关键词：

D O I：

10.1063/1.341326

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4144 / 4149

页数：6

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