PULSED LASER TREATMENT OF DIAMOND-LIKE CARBON-FILMS

被引：39

作者：

PRAWER, S ^{[1
]}

KALISH, R ^{[1
]}

ADEL, M ^{[1
]}

机构：

[1] ISRAEL & INST TECHNOL,TECHNION,INST SOLID STATE,HAIFA,ISRAEL

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 23期

关键词：

D O I：

10.1063/1.96876

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1585 / 1587

页数：3

共 7 条

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[2]

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KOIDL, P .

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[5] STRUCTURE OF CARBON FILMS FORMED BY THE PLASMA DECOMPOSITION OF HYDROCARBONS. [J].

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Green, A.K. .

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[6] DIAMOND-LIKE CARBON-FILMS OF LOW HYDROGEN CONTENTS MADE WITH A MIXTURE OF HYDROCARBON AND REACTIVE GAS [J].

NIR, D ;

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LEWIN, DG .

THIN SOLID FILMS, 1984, 117 (02) :125-130

[7] EXCIMER-LASER ETCHING OF DIAMOND AND HARD CARBON-FILMS BY DIRECT WRITING AND OPTICAL PROJECTION [J].

ROTHSCHILD, M ;

ARNONE, C ;

EHRLICH, DJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :310-314

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