METALORGANIC CHEMICAL-VAPOR-DEPOSITION OF YBCO THIN-FILMS ON (100)MGO

Thin films of YBa2Cu3O7-x have been grown on stepped (100) MgO substrates by metalorganic chemical vapor deposition. Films 100 nm thick had superconducting transition temperatures of 88 K and critical current densities of 2 x 10(6) A/cm(2) (measured at 77 K). The films grew via screw dislocation mediated growth as evidenced by atomic force microscopy. At the initial stages of film growth, large holes between growth spirals were formed. These holes enlarged as film growth continued, and film performance declined. Films 250-300 nm thick had superconducting transition temperatures of 86 K and critical current densities of 1 x 10(6) A/cm(2) (measured at 77 K).