ANALYSIS OF OXYGEN-INDUCED (100)-ORIENTATION OF FE FILMS BY ELECTRON-MICROSCOPY

被引:3
作者
INOUE, Y [1 ]
TAKEBAYASHI, S [1 ]
OKUMURA, N [1 ]
机构
[1] NIPPON STEEL CORP LTD,ADV MAT & TECHNOL RES LABS,1618 IDA,NAKAHARA KU,KAWASAKI 211,JAPAN
关键词
D O I
10.1016/0304-8853(93)90565-J
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Oxygen is found to induce a (100) orientation instead of (110) in sputter-deposited Fe films onto glass substrates. Crystallographic analysis using TEM shows that a small amount of magnetite forms coherently with the Fe matrix and induces the change of the orientation.
引用
收藏
页码:141 / 145
页数:5
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