ON THE NATURE OF THE PHASES FORMED WHEN METALS ARE IMPLANTED WITH OXYGEN OR NITROGEN

被引:21
作者
KELLY, R
机构
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 64卷 / 1-4期
关键词
D O I
10.1080/00337578208223015
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
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页码:205 / 220
页数:16
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共 131 条
[101]   LOCALIZED VIBRATIONAL MODES FOR IMPLANTED OXYGEN IN GERMANIUM [J].
STEIN, HJ .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) :2889-2890
[102]   PROPERTIES AND APPLICATIONS OF ION-IMPLANTED FILMS [J].
STEPHENS, KG ;
WILSON, IH .
THIN SOLID FILMS, 1978, 50 (MAY) :325-347
[103]  
STROUD PT, 1972, VACUUM, V23, P125
[104]  
Stull DR, 1971, JANAF THERMOCHEMICAL, V37
[105]   UBER DIE OXYDBILDUNG VON EDELMETALLEN BEI KATHODENZERSTAUBUNG [J].
SUZUKI, T .
ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE, 1957, 12 (06) :497-&
[106]   MASS AND ENERGY-DEPENDENCE OF EQUILIBRIUM SURFACE COMPOSITION OF SPUTTERED TANTALUM OXIDE [J].
TAGLAUER, E ;
HEILAND, W .
APPLIED PHYSICS LETTERS, 1978, 33 (11) :950-952
[107]  
Taglauer E., 1980, P S SPUTTERING, P423
[108]   STRUCTURE DES OXIDES DE TANTALE [J].
TERAO, N .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1967, 6 (01) :21-&
[109]  
TERAO N, 1960, J PHYS SOC JPN, V15, P227
[110]   TRANSFORMATION DES RESEAUX METALLIQUES SOUS LINFLUENCE DES ELEMENTS DINSERTION - TRANSFORMATION DU NICKEL SOUS LINFLUENCE DE LAZOTE [J].
TERAO, N ;
BERGHEZAN, A .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1959, 14 (02) :139-148