DEVELOPMENT OF A 200 KV ULTRAHIGH RESOLUTION ELECTRON-MICROSCOPE

被引：0
|
作者：
KANEYAMA, T
NARUSE, M
ISHIDA, Y
机构：
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1990年 / 98期
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D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A 200kV electron microscope which enables both ultrahigh resolution observation and nm-area analysis has been developed. It is available in two versions differing in the specimen tilt angle. Their resolving powers, 0.194nm and 0.230nm respectively, have been confirmed by optical diffraction.
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页码：507 / 510
页数：4
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