SIMULTANEOUS AES AND SIMS DEPTH PROFILING OF STANDARD TA2O5 FILMS

被引：12
|
作者：
MATHIEU, HJ
LANDOLT, D
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1988年 / 11卷 / 1-2期
关键词：
D O I：
10.1002/sia.740110111
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：88 / 93
页数：6
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