GAP-STATES DISTRIBUTION IN AMORPHOUS-SILICON FILMS AS OBTAINED BY PHOTOTHERMAL DEFLECTION SPECTROSCOPY

被引:14
作者
AMATO, G [1 ]
FIZZOTTI, F [1 ]
机构
[1] UNIV TURIN,DIPARTIMENTO FIS SPERIMENTALE,I-10125 TURIN,ITALY
来源
PHYSICAL REVIEW B | 1992年 / 45卷 / 24期
关键词
D O I
10.1103/PhysRevB.45.14108
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The paper reports results on intrinsic, device-quality amorphous silicon obtained with use of photothermal deflection spectroscopy. The gap-states distribution is obtained by means of a simple and reliable derivative procedure on the absorption-coefficient spectra. A comparison with other models is made. Finally, it is shown that the peak energy of the defects can be different for surface and bulk states, and so a shift of the occupied defect peak is observed if a considerable number of surface states are introduced. This explains the higher values for the dangling-bond correlation energy obtained by means of optical methods and agrees with other experimental evaluations of the distribution of surface states such as those carried out by means of total-yield spectroscopy.
引用
收藏
页码:14108 / 14113
页数:6
相关论文
共 22 条
[1]  
ALJISHI S, 1990, MATERIALS RES SOC S, V192
[2]   PHOTOTHERMAL AND PHOTOCONDUCTIVE MEASUREMENTS OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED AMORPHOUS-SILICON [J].
AMATO, G ;
BENEDETTO, G ;
FIZZOTTI, F ;
MANFREDOTTI, C ;
SPAGNOLO, R .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 119 (01) :169-176
[3]   PHOTOTHERMAL DETECTION OF SURFACE-STATES IN AMORPHOUS-SILICON FILMS [J].
AMATO, G ;
BENEDETTO, G ;
BOARINO, L ;
SPAGNOLO, R .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 50 (05) :503-507
[4]   INFLUENCE OF SUBSTRATE IN PHOTOTHERMAL MEASUREMENTS OF THIN-FILM ABSORPTION [J].
AMATO, G ;
BENEDETTO, G ;
BOARINO, L ;
MARINGELLI, M ;
SPAGNOLO, R .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1991, 52 (04) :280-284
[5]  
AMER N, 1984, SEMICONDUCTORS SEM B, V21
[6]  
BENNETT MS, 1987, MATERIALS RES SOC S, V95
[7]  
CURTINS H, 1988, ADV DISORDERED SEMIC, V1
[8]  
FRITZSCHE H, 1984, SEMICONDUCTORS SEM C, V21
[9]  
HATA N, 1991, MATERIALS RES SOC S, V219
[10]   PHOTOTHERMAL DEFLECTION SPECTROSCOPY AND DETECTION [J].
JACKSON, WB ;
AMER, NM ;
BOCCARA, AC ;
FOURNIER, D .
APPLIED OPTICS, 1981, 20 (08) :1333-1344