TIME-RESOLVED MEASUREMENTS OF PLUME SHIELDING DURING ARF LASER-ABLATION OF SILICON

被引：6
|
作者：
TOKAREV, V
MARINE, W
LUNNEY, JG
SENTIS, M
机构：
[1] UNIV DUBLIN TRINITY COLL,DEPT PURE & APPL PHYS,DUBLIN 2,IRELAND
[2] FAC SCI LUMINY,IMFM UM 34,CNRS,F-13288 MARSEILLE 9,FRANCE
来源：
THIN SOLID FILMS | 1994年 / 241卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(94)90412-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new method is proposed for the processing of experimental data from reflectivity measurements from a target-plume system. This method gives the possibility of finding the order of laser radiation absorption in the laser induced plume during the laser-target interaction time. We show that three-photon absorption is a main mechanism of plume shielding in the case of crystalline silicon ablation by ArF (lambda = 193 nm) laser.
引用
收藏
页码：129 / 133
页数：5
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