PREPARING YBCO SUPERCONDUCTING FILMS BY MOCVD WITH UV-LIGHT IRRADIATION

被引：10

作者：

OHNISHI, H ^{[1
]}

HANAOKA, K ^{[1
]}

GOTO, Y ^{[1
]}

HARIMA, H ^{[1
]}

TACHIBANA, K ^{[1
]}

机构：

[1] KYOTO INST TECHNOL,SAKYO KU,KYOTO 606,JAPAN

来源：

PHYSICA C | 1991年 / 190卷 / 1-2期

关键词：

D O I：

10.1016/S0921-4534(05)80226-6

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A technique for a low-temperature deposition of YBa2Cu3O7-x superconducting films by MOCVD (metal-organic chemical vapor deposition) is described. By supplying oxygen (O2) including 1.5% of ozone with a Hg-lamp irradiation during deposition. a superconducting film with a zero-resistive temperature of 45 K was obtained at 580-degrees-C of substrate temperature. Photo-excitation of both ozone and MO source materials seems to have a cooperative effect on the deposition.

引用

页码：134 / 136

页数：3

共 9 条

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