PREPARATION AND CHARACTERIZATION OF CU-CU2O CERMET FILMS

被引：7
|
作者：
RAO, GM [1 ]
PANCHAPAGESAN, TS [1 ]
MOHAN, S [1 ]
机构：
[1] INDIAN INST SCI,MAT RES CTR,BANGALORE 560012,KARNATAKA,INDIA
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1990年 / 51卷 / 05期
关键词：
81.15C; 81.40; Rs;
D O I：
10.1007/BF00348384
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Metal-insulator composites (cermets) find use in a wide range of applications. In this paper the preparation of cermet films by dc reactive magnetron sputtering is presented. These cermets have been characterised by measuring their electrical resistance and the properties have been correlated to the microstructure and composition. Magnetron sputtering is found to be very effective in controlling the composition of the deposited films, enabling the preparation of films with tailored properties. © 1990 Springer-Verlag.
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收藏
页码：423 / 426
页数：4
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