共 8 条
[3]
GELLER S, 1974, AIP C P, V24, P372
[6]
ISHII K, 1980 P INT C, P831
[7]
TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .1. ION-SOURCE TECHNOLOGY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1982, 21 (03)
:725-736