RAMAN-SCATTERING OF SIC - APPLICATION TO THE IDENTIFICATION OF HETEROEPITAXY OF SIC POLYTYPES

被引:116
作者
OKUMURA, H
SAKUMA, E
LEE, JH
MUKAIDA, H
MISAWA, S
ENDO, K
YOSHIDA, S
机构
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D O I
10.1063/1.338157
中图分类号
O59 [应用物理学];
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页码:1134 / 1136
页数:3
相关论文
共 10 条
[1]  
Air Force Cambridge Research Laboratories (U.S.)
[2]  
University of South Carolina in: Silicon Carbide, 1974, SILICON CARBIDE 1973
[3]   PHONON DISPERSION CURVES BY RAMAN SCATTERING IN SIC POLYTYPES 3C,4H,6H,15R,AND 21R [J].
FELDMAN, DW ;
PARKER, JH ;
CHOYKE, WJ ;
PATRICK, L .
PHYSICAL REVIEW, 1968, 173 (03) :787-&
[4]   RAMAN SCATTERING IN 6H SIC [J].
FELDMAN, DW ;
PARKER, JH ;
CHOYKE, WJ ;
PATRICK, L .
PHYSICAL REVIEW, 1968, 170 (03) :698-&
[5]  
Knippenberg WF., 1963, PHILIPS RES REP, V18, P161
[6]   EXPERIMENTAL 3C-SIC MOSFET [J].
KONDO, Y ;
TAKAHASHI, T ;
ISHII, K ;
HAYASHI, Y ;
SAKUMA, E ;
MISAWA, S ;
DAIMON, H ;
YAMANAKA, M ;
YOSHIDA, S .
IEEE ELECTRON DEVICE LETTERS, 1986, 7 (07) :404-406
[7]   RELATIVE RAMAN INTENSITIES OF THE FOLDED MODES IN SIC POLYTYPES [J].
NAKASHIMA, S ;
KATAHAMA, H ;
NAKAKURA, Y ;
MITSUISHI, A .
PHYSICAL REVIEW B, 1986, 33 (08) :5721-5729
[8]   PRODUCTION OF LARGE-AREA SINGLE-CRYSTAL WAFERS OF CUBIC SIC FOR SEMICONDUCTOR-DEVICES [J].
NISHINO, S ;
POWELL, JA ;
WILL, HA .
APPLIED PHYSICS LETTERS, 1983, 42 (05) :460-462
[9]   SCHOTTKY-BARRIER FIELD-EFFECT TRANSISTORS OF 3C-SIC [J].
YOSHIDA, S ;
DAIMON, H ;
YAMANAKA, M ;
SAKUMA, E ;
MISAWA, S ;
ENDO, K .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (08) :2989-2991
[10]   SCHOTTKY-BARRIER DIODES ON 3C-SIC [J].
YOSHIDA, S ;
SASAKI, K ;
SAKUMA, E ;
MISAWA, S ;
GONDA, S .
APPLIED PHYSICS LETTERS, 1985, 46 (08) :766-768