INTENSITY ANALYSIS OF XPS SPECTRA TO DETERMINE OXIDE UNIFORMITY - APPLICATION TO SIO2-SI INTERFACES

被引：61
作者：
VASQUEZ, RP
GRUNTHANER, FJ
机构：
来源：
SURFACE SCIENCE | 1980年 / 99卷 / 03期
关键词：
D O I：
10.1016/0039-6028(80)90561-0
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：681 / 688
页数：8
相关论文
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