INTENSITY ANALYSIS OF XPS SPECTRA TO DETERMINE OXIDE UNIFORMITY - APPLICATION TO SIO2-SI INTERFACES

被引：61

作者：

VASQUEZ, RP

GRUNTHANER, FJ

机构：

来源：

SURFACE SCIENCE | 1980年 / 99卷 / 03期

关键词：

D O I：

10.1016/0039-6028(80)90561-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：681 / 688

页数：8

共 13 条

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