SECONDARY-ELECTRON ENERGY ANALYZERS FOR ELECTRON-BEAM TESTING

被引：10
作者：
PLIES, E
机构：
[1] Forschungslaboratorien, Siemens AG, D-8000 München 83
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1990年 / 298卷 / 1-3期
关键词：
D O I：
10.1016/0168-9002(90)90610-I
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Existing post-lens and through-lens analyzers for electron-beam testing are reviewed. A novel through-lens analyzer is proposed which can be operated in two modes: in the conventional retarding-field mode with a feedback technique or in a dispersive multichannel mode with an open-loop technique. In addition, an improved and fast ray-tracing method for the secondary electron trajectories is introduced, which uses Lenz's model field and series expansions for calculating the spatial magnetic field. © 1990.
引用
收藏
页码：142 / 155
页数：14
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