ON THE USE OF BASIC ZINC ACETATE ZN4O(CH3CO2)6 AS A NOVEL PRECURSOR FOR THE DEPOSITION OF ZNO BY LOW-PRESSURE METALLO ORGANIC-CHEMICAL VAPOR-DEPOSITION - THEIR CHARACTERIZATION BY LOW-ENERGY ELECTRON INDUCED X-RAY-EMISSION SPECTROSCOPY

被引：29

作者：

GYANI, AK ^{[1
]}

KHAN, OFZ ^{[1
]}

OBRIEN, P ^{[1
]}

URCH, DS ^{[1
]}

机构：

[1] UNIV LONDON QUEEN MARY COLL,DEPT CHEM,MILE END RD,LONDON E1 4NS,ENGLAND

来源：

THIN SOLID FILMS | 1989年 / 182卷

关键词：

D O I：

10.1016/0040-6090(89)90270-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L1 / L3

页数：3

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