PROBLEMS OF CONTROLLING THE OPTICAL-THICKNESS OF INFRARED COATINGS DURING DEPOSITION

被引：0

作者：

ZHANG, KQ

ZHANG, FS

YAN, YX

机构：

[1] Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, 200083

来源：

APPLIED OPTICS | 1993年 / 32卷 / 28期

关键词：

OPTICAL COATINGS; PROCESS CONTROL;

D O I：

10.1364/AO.32.005579

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Special problems that influence the accuracy of controlling the optical thickness of infrared coatings during deposition are discussed.

引用

页码：5579 / 5582

页数：4