X-RAY-DIFFRACTION AND ELECTRON-MICROSCOPY STUDY OF CR/SB MULTILAYERED FILMS

Structures of [Cr(2 angstrom)/Sb(50 angstrom)]n multilayered films have been investigated by X-ray diffraction and transmission electron microscopy (TEM) of cross sections. When the substrate temperature (T(s)) was 90-degrees-C, an epitaxial structure with a coherent stacking of Sb and compound (CrSb) layers was formed by the interfacial reaction. On the other hand, at T(s) = -50-degrees-C, a non-epitaxial structure composed of crystalline Sb layers and amorphous Cr metal layers was obtained. Interfaces of multilayers observed by TEM are very flat for both samples. The structures of very thin Cr layers depend on the reactivity of interfaces and greatly affect on the orientations of Sb layers.