MIRAU CORRELATION MICROSCOPE

被引：381

作者：

KINO, GS

CHIM, SSC

机构：

[1] Stanford University, Hansen Laboratories of Physics, Ginzton Laboratory, Stanford, CA

来源：

APPLIED OPTICS | 1990年 / 29卷 / 26期

关键词：

D O I：

10.1364/AO.29.003775

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter. This microscope provides the amplitude and phase information for the reflected signal from a sample located on the microscope-object plane. The device is remarkably insensitive to vibrations and is self-correcting for spherical and chromatic range aberrations of the objective. An imaging theory for the correlation microscope has been derived, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector. The range resolution is slightly better than that for a scanning optical microscope using a lens with the same aperture. © 1990 Optical Society of America.

引用

页码：3775 / 3783

页数：9