CONTAMINANTS ON CHEMICALLY ETCHED SILICON SURFACES - LEED-AUGER METHOD

被引：99

作者：

CHANG, CC

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(70)90153-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：283 / &

共 29 条

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