CALCULATION AND MEASUREMENT OF THE VOLUME FLOW-RATE DEPENDENCE OF TURBOMOLECULAR PUMPS ON THE TYPE OF GAS

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作者：
REICH, G
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VAKUUM-TECHNIK | 1989年 / 38卷 / 1-2期
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TH [机械、仪表工业];
学科分类号：
0802 ;
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页码：3 / 8
页数：6
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