DIRECT WRITING OF OPTICAL GRATINGS USING A SCANNING ELECTRON-MICROSCOPE

被引：38
作者：
NISHIHARA, H
HANDA, Y
SUHARA, T
KOYAMA, J
机构：
来源：
APPLIED OPTICS | 1978年 / 17卷 / 15期
关键词：
D O I：
10.1364/AO.17.002342
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2342 / 2345
页数：4
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