EVIDENCE OF A CHARGE INDUCED CONTRIBUTION TO THE SPUTTERING YIELD OF INSULATING AND SEMICONDUCTING MATERIALS

被引：33
作者：
ECCLES, AJ
VANDENBERG, JA
BROWN, A
VICKERMAN, JC
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 04期
关键词：
D O I：
10.1063/1.97165
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：188 / 190
页数：3
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