EXPERIMENTAL-STUDY OF FIELD-EMISSION PROPERTIES OF THE SPINDT-TYPE FIELD EMITTER

被引:45
作者
ITOH, S
WATANABE, T
OHTSU, K
TANIGUCHI, M
UZAWA, S
NISHIMURA, N
机构
[1] Futaba Corp, Chiba
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 02期
关键词
D O I
10.1116/1.588339
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article reports experiments conducted to review several factors closely related to emission quality required for flat panel displays. Using the measurement of the emission of fabricated Spindt-type emitters, the dependence of current density on the distance from the tip of an emitter cone to the upper surface of the gate was investigated. It was also confirmed that the shape of the emitter cone was largely affected by the gate hole diameter and material of cone. The maximum half-angle of emission on anode from a tip was compared between the simulated electron beam spread and actual measurements made for emitter arrays.
引用
收藏
页码:487 / 490
页数:4
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