COMPUTER MODELING OF TEMPERATURE AND STRESS DISTRIBUTIONS IN LEC-GROWN GAAS CRYSTALS

被引:14
作者
MEDUOYE, GO [1 ]
BACON, DJ [1 ]
EVANS, KE [1 ]
机构
[1] UNIV LIVERPOOL,DEPT MAT SCI & ENGN,POB 147,LIVERPOOL L69 3BX,ENGLAND
关键词
D O I
10.1016/0022-0248(91)90242-W
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Temperature and thermal stress distributions have been modelled in a LEC GaAs crystal at various stages of growth using boundary conditions which allow for radiation into the argon atmosphere and thermal conduction into the boric oxide encapsulant. Results have been obtained as a function of oxide conductivity, oxide depth, ambient temperature above the oxide, and shape of the GaAs solid-melt interface shape. Heat losses into the encapsulant are important, both in reducing thermal stresses in the early stages of growth and in increasing them once the conical region has fully formed. It is shown that in both situations, a reduction in thermal stress can be effected by increasing the depth of oxide and the temperature of the environment it loses heat to. The convex crystal-melt interface shapes that occur in practice are not optimum for reducing stress: flatter interfaces should be aimed for. These results are discussed in the context of other studies.
引用
收藏
页码:627 / 636
页数:10
相关论文
共 17 条
[1]   THEORY OF TRANSPORT PROCESSES IN SINGLE-CRYSTAL GROWTH FROM THE MELT [J].
BROWN, RA .
AICHE JOURNAL, 1988, 34 (06) :881-911
[2]   MODELING OF THE GROWTH OF GAAS BY THE LEC TECHNIQUE .1. THERMAL DISTRIBUTION IN THE CRYSTAL [J].
CROWLEY, AB ;
STERN, EJ ;
HURLE, DTJ .
JOURNAL OF CRYSTAL GROWTH, 1989, 97 (3-4) :697-708
[3]   THERMAL-CAPILLARY ANALYSIS OF CZOCHRALSKI AND LIQUID ENCAPSULATED CZOCHRALSKI CRYSTAL-GROWTH .1. SIMULATION [J].
DERBY, JJ ;
BROWN, RA .
JOURNAL OF CRYSTAL GROWTH, 1986, 74 (03) :605-624
[4]   NUMERICAL-CALCULATION OF THE GLOBAL HEAT-TRANSFER IN A CZOCHRALSKI FURNACE [J].
DUPRET, F ;
RYCKMANS, Y ;
WOUTERS, P ;
CROCHET, MJ .
JOURNAL OF CRYSTAL GROWTH, 1986, 79 (1-3) :84-91
[5]   FORMATION OF DISLOCATIONS DURING LIQUID ENCAPSULATED CZOCHRALSKI GROWTH OF GAAS SINGLE-CRYSTALS [J].
DUSEAUX, M ;
JACOB, G .
APPLIED PHYSICS LETTERS, 1982, 40 (09) :790-793
[7]  
GRANT IP, COMMUNICATION
[8]   THE THEORY AND PRACTICE OF DISLOCATION REDUCTION IN GAAS AND INP [J].
JORDAN, AS ;
VONNEIDA, AR ;
CARUSO, R .
JOURNAL OF CRYSTAL GROWTH, 1984, 70 (1-2) :555-573
[9]   A THERMOELASTIC ANALYSIS OF DISLOCATION GENERATION IN PULLED GAAS CRYSTALS [J].
JORDAN, AS ;
CARUSO, R ;
VONNEIDA, AR .
BELL SYSTEM TECHNICAL JOURNAL, 1980, 59 (04) :593-637
[10]   STRESSES NEAR THE SOLID-LIQUID INTERFACE DURING THE GROWTH OF A CZOCHRALSKI CRYSTAL [J].
LAMBROPOULOS, JC .
JOURNAL OF CRYSTAL GROWTH, 1987, 80 (02) :245-256