GROWTH AND STRUCTURE OF ALUMINUM FILMS ON (001) SILICON-CARBIDE

被引:62
作者
BERMUDEZ, VM
机构
关键词
D O I
10.1063/1.340439
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4951 / 4959
页数:9
相关论文
共 65 条
[1]   SURFACE MODIFICATION STRATEGIES FOR (100)3C-SIC [J].
BELLINA, JJ ;
FERRANTE, J ;
ZELLER, MV .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1692-1695
[2]   AUGER AND ELECTRON ENERGY-LOSS STUDY OF THE PD/SIC INTERFACE AND ITS DEPENDENCE ON OXIDATION [J].
BERMUDEZ, VM .
APPLICATIONS OF SURFACE SCIENCE, 1983, 17 (01) :12-22
[3]   AUGER AND ELECTRON ENERGY-LOSS STUDY OF THE AL/SIC INTERFACE [J].
BERMUDEZ, VM .
APPLIED PHYSICS LETTERS, 1983, 42 (01) :70-72
[4]   ELECTRON-STIMULATED DESORPTION OF POSITIVE-IONS FROM HEXAGONAL ALPHA-SIC [J].
BERMUDEZ, VM ;
PARRILL, TM ;
KAPLAN, R .
SURFACE SCIENCE, 1986, 173 (01) :234-244
[5]  
Briggs D., 1983, PRACTICAL SURFACE AN
[6]   REDUCTION OF SILICON-ALUMINUM INTERDIFFUSION BY IMPROVED SEMICONDUCTOR SURFACE ORDERING [J].
BRILLSON, LJ ;
SLADE, ML ;
KATNANI, AD ;
KELLY, M ;
MARGARITONDO, G .
APPLIED PHYSICS LETTERS, 1984, 44 (01) :110-112
[7]   PHOTOEMISSION-STUDIES OF ATOMIC REDISTRIBUTION AT GOLD-SILICON AND ALUMINUM-SILICON INTERFACES [J].
BRILLSON, LJ ;
KATNANI, AD ;
KELLY, M ;
MARGARITONDO, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :551-555
[8]   SI(100) SURFACES - ATOMIC AND ELECTRONIC-STRUCTURES [J].
CHADI, DJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1290-1296
[9]   SOLID-STATE REACTION OF TITANIUM AND (0001) ALPHA-SIC [J].
CHAMBERLAIN, MB .
THIN SOLID FILMS, 1980, 72 (02) :305-311
[10]   ADSORPTION OF AL ON CLEAVED SI(111) AT ROOM-TEMPERATURE [J].
CHEN, P ;
BOLMONT, D ;
SEBENNE, CA .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1984, 17 (27) :4897-4905