SURFACE-PROPERTIES OF METAL-NITRIDE AND METAL-CARBIDE FILMS DEPOSITED ON NB FOR RADIOFREQUENCY SUPERCONDUCTIVITY

被引：38

作者：

GARWIN, EL ^{[1
]}

KING, FK ^{[1
]}

KIRBY, RE ^{[1
]}

AITA, O ^{[1
]}

机构：

[1] UNIV OSAKA PREFECTURE,COLL ENGN,SAKAI,OSAKA 591,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 03期

关键词：

D O I：

10.1063/1.338159

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1145 / 1154

页数：10

共 23 条

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